Micro Semiconducting Gas Sensors for Low power operation and its fabrication method

摘要

The present invention relates to a micro-semiconductor type gas sensor for low-power driving and a method of manufacturing the same, and more particularly, to a micro-semiconductor type gas sensor and a method of manufacturing the same. The substrate includes an air gap, a peripheral portion provided on the substrate and including electrode pads, ) Connected to the electrode pads, a sensing film-containing sensor portion on the sensing electrodes, and a conductive-line-containing connection portion that connects the peripheral portion and the sensor portion and electrically connects the electrode pads and the sensing electrodes, Wherein the air gap penetrates through the substrate and a thermal isolation region is provided extending from the air gap between the peripheral portion and the sensor portion, and a method of manufacturing the same.;