A Fabrication Method of Print Head for Multiplex Chemotyping Microarray

摘要

The present invention relates to a method of manufacturing a printing head of a multiplex chemotyping microarray (MCM) device having silicon-based micropatterned gaps formed thereon capable of performing droplet printing in a picoliter scale and, more specifically, relates to a method of manufacturing a printing head of the MCM comprising: (a) a step of preparing a silicon wafer (10) which has been washed with a piranha solution; (b) a step of stacking a silicon nitride film on a front surface and a rear surface of the prepared silicon wafer; (C) a step of applying a photoresist to an upper surface and a lower surface of the silicon nitride film to be dried; (d) a step of arranging a photomask formed with a predetermined pattern on one side surface of the photoresist, and then irradiating ultraviolet rays to the photomask to partially remove photoresist with the predetermined pattern; (e) a step of forming a sample droplet storage space opening part by removing the silicon nitride film in contact with the photoresist removed in the predetermined pattern; (f) a step of removing the photoresist stacked on the silicon nitride film; (g) a step of etching the silicon wafer to form a sample droplet storage space; and (h) a step of irradiating ultrasonic waves to form a sample droplet opening part.