Manufacturing process method of load port moudle and Manufacturing process system of load port moudle

摘要

The present invention relates to a load port module manufacturing process method and a load port module manufacturing process facility. Here, the method of manufacturing a load port module includes a step of connecting a plurality of members to connect a load port transporting apparatus provided with a roll rotation housing rotating in a roll direction to a load port assembly line portion forming a load port module (A), (B) moving a load port transfer device along a rail provided on a bottom surface of the load port assembly, forming a load port module by providing a member to the roll rotation housing, (C) detaching the load port module from the roll rotation housing and fixing it to the pitch rotation housing which is installed on the load port fixing device and rotates in the pitch direction. The load port module manufacturing process facility includes a load port transfer device for transferring the load port module and a load port fixing device for fixing the load port module detached from the load port transfer device, A moving frame, a roll rotating housing connected to at least one end of the frame, the rotating shaft being parallel to a longitudinal direction of the frame, the rotating rotating housing being rotatable in a roll direction, and a plurality of members installed in the roll rotating housing And a rail guide portion connected to a rail provided on a bottom surface of the load port assembly line portion, The load port fixing device includes a main body including a support portion perpendicular to the bottom surface, and a pitch rotation housing hinged to the upper end of the support portion and rotatable in a pitch direction.