Fluorescent silicon nanoparticle for detecting copper ion method for preparing the same and ion detecting sensor using the same

摘要

In one embodiment of the present invention, there is provided a method of manufacturing a semiconductor device, including: a first step of preparing a silicon wafer; a second step of etching the prepared silicon wafer; a third step of ultrasonically treating the etched silicon wafer to separate silicon nanoparticles; And a fourth step of hydrosilylating the surface of the particles with an organic compound containing a carbon-carbon double bond (C = C) at the end of the carbon chain to modify the surface of the silicon nanoparticle. And a method for producing the same.