Arrangement for CSS coating of substrates with a pinhole diaphragm with optimized thermal emission behavior.

摘要

An arrangement for the CSS coating of substrates is presented in which a perforated diaphragm (2) is arranged between a heated crucible (3) with a subliming substance (31) and the substrate (1) to be coated, wherein the perforated diaphragm (2) on the side facing the crucible and / or the substrate has a surface structure and / or coating and / or covering which increases the thermal emission in the direction of the crucible (3) and / or reduces in the direction of the substrate (1).