A method and apparatus for measuring high frequency electrical characteristics of an electronic device and method for calibrating devices for measuring high frequency electrical characteristics

摘要

A method of measuring high frequency characteristics of an electronic device (17; 38; 44), the method comprising the steps of: providing a transmission line (12; 30; 40) whose electrical characteristics per unit length are known, the transmission line (12; 30; 40) comprises a plurality of signal conductors (12a, 12b; 31, 32, 33; 40, 41) disposed with a gap therebetween and at least one ground conductor (12c; 34; 43); Connecting the signal conductors (12a, 12b, 31, 32, 33, 40, 41) and the ground conductor (12c, 34, 43) to associated measuring ports (11a, 11b, 35, 36) of a measuring device; Measuring electrical characteristics at at least three points in the longitudinal direction of each signal conductor (12a, 12b; 31, 32, 33, 40, 41) in a connection state in which each signal conductor (12a, 12b; 31, 32, 33; 41) is connected to the ground conductor (12c; 34; 43); Measuring electrical characteristics in a passing state between the signal conductors (12a, 12b; 31, 32, 33; 40, 41); Obtaining error factors of a measurement system including the transmission line (12; 30; 40) based on measured values in the connection state, measured values in the passage state, and electrical characteristics of the transmission line (12; 30; 40); Switching the electronic device (17; 38; 44) to be measured between the signal conductors (12a, 12b; 31, 32, 33; 40, 41) or between the signal conductors (12a, 12b; 31, 32, 33; 40, 41) and the ground conductor (12c; 34; 43) and measuring electrical characteristics; and removing the error factors of the measuring system from measured values of the electronic ...