Measurement error correction method and two electronic component characteristic measurement devices

摘要

A measurement error correction method in which, with respect to an electronic component (10, 11), the signal line ports (112, 114) connected to signal lines related to application or detection of a high frequency signal and nonsignal line ports (116, 118) adjacent to the signal line ports (112 , 114), from results of measuring the signal line ports (112, 114) and the nonsignal line ports (116, 118) when the electronic component (10, 11) is attached to a test device (30, 130, 230), an estimated electrical potential. Characteristic value of the electronic component (10, 11) obtained when the signal line ports (112, 114) are measured when the electronic component (10, 11) is attached to a reference device (20, 120, 220) that measures only the signal line gate (112, 114) is allowed to be calculated, the measurement error correction method comprising: a first step of measuring an electrical characteristic tik of at least one of signal line ports of each of correction data acquisition patterns to obtain data for correcting measurement errors, wherein at least three types of correction data acquisition patterns are applied to the test device (30; 130; 230) and the correction data acquisition patterns are attached to the reference device (20; 120; 220); a second step of preparing a correction data acquisition pass device for obtaining data to correct measurement errors in which at least one of the signal line ports and at least one of the nonsignal line ports are electrically connected, measuring the signal line port and the nonsignal line port, the correction data acquisition pass device at the test device (30; 130; 230), and measuring the signal line port, wherein the correction data acquisition passage device is attached to the reference device (20; 120; 220) ...