Micromechanical structure for receiving and / or generating acoustic signals and method for receiving and / or generating acoustic signals

摘要

Micromechanical structure (10, 20) for receiving and / or generating acoustic signals in a medium at least partially surrounding the structure (10, 20), the structure (10, 20) having a membrane (1), the membrane ( 1) is mechanically fixed by means of a suspension (30), wherein the micromechanical structure (10, 20) for adjusting the rigidity of the suspension (30) comprises tuning means (41, 42, 45), characterized in that - the tuning means (41 , 42, 45) are provided so as to exert a force (46) substantially in the main plane of extension of the membrane (1) on the suspension (30), wherein by the exertion of the force (46) rotation of the membrane (1) around a perpendicular to the main extension plane of the membrane (1) is effected or - the tuning means (41, 42, 45) at least partially provided as part of the suspension (30) or - the tuning means (41, 42, 45) as a comb-like electrode structure are provided.