Apparatus and method for the simultaneous detection of aberrations and stray light characteristic variables of an optical system

摘要

An apparatus for parallel or sequential detection of aberrations and stray light characteristic variables of an optical system comprising a point light source (q2), an optical transmission system (af) with at least one detection unit (det) and a trigger - and evaluation unit, characterized in that the optical transmission system (üs) at least a reflective or transmissive variable element (se) to be structured in a to the point light source (q2) conjugated plane in which the variably is to be patterned element (se) in the evaluation beams gear (ts, ts b) is arranged.