A method according to various embodiments may include: measuring a contact force between at least one probe and at least one contact pad for a plurality of probe overdrive positions and determining a relationship between the contact force and the probe overdrive position from the measured contact forces; Determining a first region in the relationship having a non-linear dependence of the contact force on the probe overdrive position and a second region having a linear dependence of the contact force on the probe overdrive position; and determining a process window for a pad inspection process based on the determined first region and the determined second region.
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