Method for reducing a magnetic scattering-field of a vacuum pump or rotary unit and vacuum pump and rotary unit

摘要

Disclosed is a method for reducing a magnetic scattering field of a vacuum pump, in particular a turbomolecular pump, or a rotary unit for a vacuum pump, in particular for a turbomolecular pump, wherein the magnetic scattering field is at least partially generated by at least one permanent magnet bearing, which for mutual rotatable mounting of a rotor and a stator of the vacuum pump or the rotation unit is formed, wherein at least one component of the scattering field is determined at least one reference point, and wherein the magnetic field of a compensation magnet is permanently changed so that this reduces the component of the scattering field at least at the reference point, preferably compensated.