A voltage reduction in the case of the laser is again closure by means of temporally shaped laser pulses and pulse trains

摘要

It is a method for producing a micromechanical component with a substrate and with a connected to the substrate and with the substrate a first cavity surrounding cap is proposed, wherein in the first cavity a first pressure prevails, and a first gas mixture with a first chemical composition is enclosed.– in a first process step a the first cavern with an environment of the micromechanical component connected to the access opening in the substrate or in the cap is formed,– in a second process step of the first pressure and / or the first chemical composition in the first cavity is set.– in a third process step, the access opening by the introduction of energy or heat in an absorbent part of the substrate or of the cap with the help of a laser is closed, wherein the introduction of the energy or heat with the aid of a laser pulse duration and a laser pulse intensity comprehensive temporally shaped laser pulse to the reduction of temperature gradients in the substrate or in the cap is controlled.