Systems and methods for determining the suitability of RF sources in ultraviolet systems

摘要

A UV system (100) for irradiating a substrate having an RF source (102) capable of generating RF energy, a UV lamp (105) adapted to emit UV energy, when excited by the RF energy generated by the RF source and a monitor (114) connected to the RF source. The monitor has data related to the RF source. The UV system further includes a controller (116) configured to communicate with the monitor, and the controller determines whether the RF source is suitable for use with the UV system based on the data of the monitor and / or has reached the end of its useful life.