Susceptor for holding a semiconductor wafer, method for depositing an epitaxial layer on a front side of a semiconductor wafer and semiconductor wafer with an epitaxial layer

摘要

Susceptor for holding a semiconductor wafer during the deposition of an epitaxial layer on a front side of the semiconductor wafer, comprising a susceptor ring and a susceptor bottom, wherein under the susceptor ring recesses are arranged distributed rotationally symmetrically in the susceptor bottom; A method of depositing an epitaxial layer on a front side of a semiconductor wafer using the susceptor; and semiconductor wafer with epitaxial layer.