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PRESSURE SENSOR COMPRISING A STRUCTURE FOR CONTROLLING AN ADHESIVE LAYER RESISTANT TO TEMPERATURE VARIATIONS
PRESSURE SENSOR COMPRISING A STRUCTURE FOR CONTROLLING AN ADHESIVE LAYER RESISTANT TO TEMPERATURE VARIATIONS
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机译:包含结构的压力传感器,用于控制耐温度变化的粘合层
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摘要
The invention relates to a pressure sensor including: a sensitive element including a mounting substrate, said mounting substrate including a top surface and a bottom surface, the sensitive element also including a deformable diaphragm that is connected to the top surface of the mounting substrate; a housing, in which the sensitive element is placed, said housing including a base; an intermediate structure placed between the base of the housing and the mounting substrate, said intermediate structure including a base, the base including a top surface and a bottom surface that is connected to the base of the housing, said intermediate structure being configured such as to keep the mounting substrate at a predetermined distance from the top surface of the intermediate structure; and an adhesive layer extending onto the top surface of the intermediate structure. Said adhesive layer has a thickness controlled by the predetermined distance at which the mounting substrate is kept from the top surface of the intermediate structure. The invention also relates to a method for making such a pressure sensor.
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