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CHARACTERIZATION OF A SAMPLE BY DECOMPOSITION BASED ON MATERIALS.

机译:基于材料的分解表征。

摘要

The invention relates to a method for characterizing a sample, by estimating a plurality of characteristic thicknesses, each associated with a calibration material, comprising the following steps: - acquisition of a spectrum of energy transmitted through this sample (Sech), located in an X and / or gamma spectral band, said transmitted spectrum of the sample; for each of a plurality of calibration spectra (Sbase (Lk; L1)), calculating a likelihood from said calibration spectrum (Sbase (Lk; L1)) and the transmitted spectrum of the sample (Sech) each calibration spectrum (Sbase (Lk; L1)) corresponding to the energy spectrum transmitted through a stack of shims each formed of a known thickness of calibration material; estimating the characteristic thicknesses (L1, L2) associated with the sample according to the maximum likelihood criterion.
机译:本发明涉及一种通过估计分别与校准材料相关的多个特征厚度来表征样品的方法,该方法包括以下步骤:-获取通过该样品(Sech)传输的位于X方向的能量光谱。和/或伽玛光谱带,所述样品的透射光谱;对于多个校准光谱(Sbase(Lk; L1))的每一个,从所述校准光谱(Sbase(Lk; L1))和每个校准光谱(Sech)的样品的透射光谱(Sech)计算似然性。 L1))对应于通过一堆垫片传输的能量谱,每个垫片均由已知厚度的校准材料制成;根据最大似然准则估算与样本相关的特征厚度(L1,L2)。

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