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X RAY THICKNESS METER

机译:X射线测厚仪

摘要

To provide an X-ray thickness gauge having a calibration curve calibration function with a cost further reduced. An X-ray thickness gauge according to an embodiment measures a plate thickness of a measured object, based on a detected dose obtained by irradiating the measured object with X-ray and a calibration curve, and can execute a calibration curve calibration processing to calibrate the calibration curve. The X-ray thickness gauge stores a correction curve indicating detected dose change rates at a plurality of calibration points defining desired thicknesses, for each disturbance factor varying the detected dose. In addition, the X-ray thickness gauge stores a detected dose in a first state in which a calibration plate is not inserted in an X-ray beam, a detected dose in a second state in which the calibration plate is inserted in the X-ray beam, and a detected dose in a third state in which the X-ray is blocked, here the detected doses are used at the time of creating the calibration curve. Furthermore, the X-ray thickness gauge corrects the detected doses at the respective calibration points using the correction curve, and calibrates the calibration curve, based on the relevant corrected detected doses.
机译:提供一种具有校准曲线校准功能的X射线测厚仪,其成本进一步降低。根据实施例的X射线测厚仪基于通过用X射线和校准曲线照射被测物而获得的检测剂量来测量被测物的板厚,并且可以执行校准曲线校准处理以对被测物进行校准。校准曲线。 X射线厚度计存储校正曲线,该校正曲线指示在定义所需厚度的多个校准点处的检测剂量变化率,其中每个干扰因素都会改变检测剂量。此外,X射线测厚仪在未将校准板插入X射线束的第一状态下存储检测到的剂量,在将校准板插入X射线束的第二状态下存储检测到的剂量。射线束和在X射线被阻挡的第三状态下的检测到的剂量,此处检测到的剂量在创建校准曲线时使用。此外,X射线厚度计使用校正曲线在各个校准点处校正检测到的剂量,并且基于相关的校正后的检测到的剂量来校正校准曲线。

著录项

  • 公开/公告号EP2894433B1

    专利类型

  • 公开/公告日2018-09-26

    原文格式PDF

  • 申请/专利权人 TOSHIBA KK;

    申请/专利号EP20120884078

  • 发明设计人 KAGAWA TAKESHI;

    申请日2012-11-16

  • 分类号G01B15/02;

  • 国家 EP

  • 入库时间 2022-08-21 13:20:02

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