MEMS rate of rotation sensor and method for operating a MEMS rate of rotation sensor

摘要

A micro rate of rotation sensor for detecting a plurality of rates of rotation about orthogonal axes (x, y, z), having a substrate (20), having a plurality of masses displaceable relative to the substrate (20) and disposed in an X-Y plane parallel to the substrate (20), having a plurality of anchors (2, 13) for attaching the masses to the substrate (20), having springs (4, 10) for connecting at least some of the masses to at least one adjacent mass or to at least one anchor (2, 13), having drive elements for oscillating at least several of the masses in the X-direction, in order to generate Coriolis forces when the substrate (20) is deflected, and having sensor elements (21) in order to detect deflections of the masses due to the Coriolis forces generated. The masses are divided into driving masses (11), X-Y sensor masses (8), or Z sensor masses (12). The X-Y sensor masses (8) are connected to the driving masses (11) and the Z sensor masses (12) by means of springs (10), and the connection between the X-Y sensor masses (8) and the driving masses (11) is such that when the driving masses (11) are driven to oscillate in the X-direction, the X-Y sensor masses (8) are driven to oscillate in the X-Y direction by means of the driving masses (11). In a method for operating a micro rate of rotation sensor for detecting a plurality of rates of rotation about orthogonal axes (x, y, z), having a substrate (20) and driving masses (11), X-Y sensor masses (8), and Z sensor masses (12) the driving masses (11) are driven by drive elements to oscillate in the X-direction, and the X-Y sensor masses (8) are driven to oscillate in the X-Y direction radially to a center by a connection to the driving masses (11). When a rate of rotation of the substrate (20) occurs about the X-axis or the Y-axis, the X-Y sensor masses (8) are jointly deflected about the Y-axis or X-axis, and when a rate of rotation of the substrate (20) occurs about the Z-axis, the X-Y sensor masses (8) are rotated about the Z-axis, and the Z sensor masses (12) are deflected substantially in the X-direction.