INCREASING THE LATERAL RESOLUTION OF ORGANIC VAPOR JET DEPOSITION BY USING A CONFINING GUARD FLOW

摘要

The invention relates to a method of depositing an organic material, wherein a carrier gas carrying an organic material is ejecting from the nozzle at a flow velocity that is at least 10 % of the thermal velocity of the carrier gas, such that the organic material is deposited onto a substrate, and wherein a guard flow is provided around the carrier gas.