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METHOD FOR DETERMINING THE CHANGING LOCATION OF THE POINT OF INCIDENCE OF AN ENERGETIC BEAM ON A DELIMITED SURFACE
METHOD FOR DETERMINING THE CHANGING LOCATION OF THE POINT OF INCIDENCE OF AN ENERGETIC BEAM ON A DELIMITED SURFACE
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机译:确定有界表面上能量束入射点的变化位置的方法
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摘要
In order to evaporate material, an electronic beam is guided over a melt surface in a periodic pattern by a detecting unit. Whether or not the actual pattern matches the target pattern specified by the deflecting unit is detected in principle on an image of the melt surface. In order to allow a better analysis of the image, the periodicity of the deflection pattern during the analysis of temporally successive images is taken into consideration.
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