公开/公告号EP3098335A4
专利类型
公开/公告日2017-12-13
原文格式PDF
申请/专利权人 JAPAN SCIENCE AND TECHNOLOGY AGENCY;NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY;
申请/专利号EP20150737807
发明设计人 HATANO MUTSUKO;IWASAKI TAKAYUKI;MIZUOCHI NORIKAZU;MAKINO TOSHIHARU;KATO HIROMITSU;YAMASAKI SATOSHI;
申请日2015-01-19
分类号G01N24/10;G01R33/60;C30B29/04;G01R33/02;G01R33/24;G01R33;G01R33/032;G01R33/12;C09K11;H01L27/15;H01L31/105;C30B25/20;
国家 EP
入库时间 2022-08-21 13:18:11