INTERLAYER THERMALLY BONDABLE GRAPHITE SHEET FOR HIGH VACUUM

摘要

The object of the present invention is to provide a material which has an excellent thermal conductivity as a thermal interface material even under the condition of high vacuum and has no risk of contaminating the interior of an apparatus and outgassing. The present invention is characterized in having a thickness of not more than 9.6 µm and not less than 50 nm and a thermal conductivity in the a-b surface direction at 25°C of not less than 1000 W/mK. It is preferred that a density be not less than 1.8 g/cm 3 in the present invention. The graphite sheet of the present invention is preferably obtained by thermally treating a polymer film at a temperature of not less than 2900°C. The polymer film is preferably at least one kind selected from among polyamides, polyimides, polyquinoxalines, polyoxadiazoles, polybenzimidazoles and the like.