MEMS TRI-AXIAL ACCELEROMETER WITH IMPROVED CONFIGURATION

摘要

A MEMS tri-axial accelerometer (32) is provided with a sensing structure (1) having: a single inertial mass (2), with a main extension in a horizontal plane (xy) defined by a first horizontal axis (x) and a second horizontal axis (y) and internally defining a first window (4) that traverses it throughout a thickness thereof along a vertical axis (z) orthogonal to the horizontal plane (xy); and a suspension structure (29), arranged within the window for elastically coupling the inertial mass to a single anchorage element (8), which is fixed with respect to a substrate and arranged within the window, so that the inertial mass (2) is suspended above the substrate and is able to carry out, by the inertial effect, a first sensing movement, a second sensing movement, and a third sensing movement in respective sensing directions parallel to the first, second, and third horizontal axes following upon detection of a respective acceleration component (a_x). In particular, the suspension structure has at least one first decoupling element (6) for decoupling at least one of the first, second, and third sensing movements from the remaining sensing movements.