DRIVING SYSTEM AND DRIVING METHOD, EXPOSURE DEVICE AND EXPOSURE METHOD, AND VIBRATION CONTROL DEVICE AND VIBRATION CONTROL METHOD

摘要

PROBLEM TO BE SOLVED: To precisely drive and control a plate stage.;SOLUTION: A feedback control system (driving system) is constructed by: a plate interferometer system (interferometer) 18 that measures an amount of control (X) related to a location of a plate stage PST (plate table PTB); a synthesis unit 52 that reproduces the amount of control (X) using model information on the plate stage PST and generates an amount of synthesized control (X_mix) by synthesizing the measurement result (Xn) with a measurement result (X_sns) of the interferometer 18; and a stage control device 50 that gives an amount of operation obtained by using the amount of synthesized control (X_mix) to the plate stage PST (plate stage drive system PSD). Thereby, even when removing noise of a specific frequency, by reproducing the amount of control (X) to synthesize the measurement result (Xn), a precise drive control of the plate state PST is enabled without impairing stability of the control system.;SELECTED DRAWING: Figure 3;COPYRIGHT: (C)2019,JPO&INPIT