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MICROCHANNEL PLATE AND PHOTOMULTIPLIER

机译:微通道板和光电倍增管

摘要

PROBLEM TO BE SOLVED: To provide a microchannel plate and a photomultiplier capable of improving gain, while suppressing deterioration of gain with time.SOLUTION: A microchannel plate 10 includes a substrate 11 having an input plane 11a and an output plane 11b, multiple channels 12 penetrating from the input plane 11a to the output plane 11b of the substrate 11, an electron emission film 14 provided on the inner wall surface 12a of the channels 12, a protection film 15 provided on the electron emission film 14 at least partially, and an input electrode 16 and an output electrode 17 provided, respectively, on the input plane 11a and the output plane 11b of the substrate 11. The electron emission film 14 is formed of MgO. The protection film 15 is formed of SiO. The protection film 15 is thinner than the electron emission film 14.SELECTED DRAWING: Figure 1
机译:解决的问题:提供一种微通道板和光电倍增管,该微通道板和光电倍增管能够在抑制增益随时间的劣化的同时提高增益。解决方案:微通道板10包括具有输入平面11a和输出平面11b的基板11,多个通道12从衬底11的输入平面11a穿透到输出平面11b,在通道12的内壁表面12a上提供的电子发射膜14,至少部分地在电子发射膜14上提供的保护膜15,输入电极16和输出电极17分别设置在基板11的输入平面11a和输出平面11b上。电子发射膜14由MgO形成。保护膜15由SiO形成。保护膜15比电子发射膜14薄。

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