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BAND GAP MEASURING METHOD AND BAND GAP MEASURING DEVICE

机译:带隙测量方法和带隙测量装置

摘要

PROBLEM TO BE SOLVED: To provide a band gap measuring method capable of estimating in-plane distribution of a band gap in a short time.SOLUTION: A band gap measuring method includes: a step S201 of causing a measuring object to emit light; a step S202 of receiving the light emitted by the measuring object not via an optical filter and imaging a first image of the measuring object; a step S203 of receiving the light emitted by the measuring object via the optical filter and imaging a second image of the measuring object; a step S204 of calculating a luminance ratio between the first image and the second image; and a step S205 of calculating a band gap of the measuring object on the basis of the luminance ratio. In a relationship between a wavelength and a transmittance of the optical filter, the transmittance does not have a maximum value and a minimum value.SELECTED DRAWING: Figure 4
机译:解决的问题:提供一种能够在短时间内估计带隙的面内分布的带隙测量方法。解决方案:带隙测量方法包括:使测量对象发光的步骤S201;步骤S202,不通过滤光器接收所述被测物发射的光,对所述被测物的第一图像进行成像。步骤S203,通过所述滤光器接收所述被测物发射的光,并对所述被测物的第二图像进行成像。步骤S204,计算第一图像与第二图像之间的亮度比;在步骤S205中,根据亮度比算出被测定物的带隙。在滤光片的波长和透射率之间的关系中,透射率不具有最大值和最小值。选择的图:图4

著录项

  • 公开/公告号JP2018009851A

    专利类型

  • 公开/公告日2018-01-18

    原文格式PDF

  • 申请/专利权人 SOLAR FRONTIER KK;

    申请/专利号JP20160138047

  • 发明设计人 YAZAKI YUSUKE;

    申请日2016-07-12

  • 分类号G01N21/63;H01L21/66;G01N21/66;

  • 国家 JP

  • 入库时间 2022-08-21 13:13:07

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