A versatile method for precise nanoscale manufacturing

摘要

A method for depositing a thin film using a nominally curved substrate. Precursor liquid organic droplets are distributed to multiple locations on the nominal non-planar substrate by one or more ink jets. To close the gap between the superstrate and the substrate, the superstrate is lowered over the dispensed droplet, causing the droplet to form a continuous film trapped between the substrate and the superstrate. . Enables non-equilibrium transients of the superstrate, the continuous film, and the substrate to occur after time. The continuous film is cured to solidify it into a solid. Separating the superstrate from the solid leaves a polymer film on the substrate. With this method, such techniques for film deposition have the film thickness range, resolution, and variation required to be applied to a wide range of applications. [Selection] Figure 2