BIAXIALLY ORIENTED POLYESTER FILM FOR DRY FILM RESIST SUPPORT AND PRODUCTION METHOD OF THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a biaxially oriented polyester film for a dry film resist support, capable of responding to demands for higher quality and higher productivity, in which entrained dust is reduced by imparting antistatic performance to one surface of the sheet, offset of an antistatic component to the other surface is prevented by imparting antistatic performance by kneading the antistatic, thereby, high resolution of a resist can be achieved, and slipping property can be significantly improved by using two types of particles having different particle diameters together.SOLUTION: The biaxially oriented polyester film for a dry film resist support is a polyester film having a multilayer structure of at least three layers, in which a difference in the surface free energy between a surface (referred as surface (A)) of one outermost layer (referred as A layer) and a surface (referred as surface (B)) of the other outermost layer (referred as B layer) is 5.0 mN/m or more, the surface specific resistance value of the surface (A) is 1.0×10Ω/unit square or more, and the surface specific resistance value of the surface (B) is 1.0×10Ω/unit square or less.SELECTED DRAWING: None