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DIE, DIE PACK, SINGLE CRYSTAL GROWTH APPARATUS AND SINGLE CRYSTAL GROWTH METHOD
DIE, DIE PACK, SINGLE CRYSTAL GROWTH APPARATUS AND SINGLE CRYSTAL GROWTH METHOD
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机译:Die,Die PACK,单晶生长装置和单晶生长方法
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摘要
PROBLEM TO BE SOLVED: To provide a die having an opening angle easily and optimally settable to the thickness of a single crystal to be grown; a die pack; a single crystal growth apparatus; and a single crystal growth method.;SOLUTION: The tip of a die having a slit and used for an EFG method is formed at an opening angle y1 (where, y1180°). The opening angle y1 is formed at an angle associated with a linear function formula y=ax+b (where, y180°, x0 mm, a0, b0°) of the thickness x mm of the die; b is 47.0° or more and 47.39°or less; the thickness x is 3.3 mm or more and 6.5 mm or less; and a is 7.75 or more and 7.80 or less. The opening angle y1 is within ±5% of the linear function formula. The die pack includes such two or more dice and is constituted so that the longitudinal direction of each slit is arranged in parallel; the single crystal growth apparatus includes the die or the die pack; and the single crystal growth method is formed using the die, the die pack or the single crystal growth apparatus.;SELECTED DRAWING: Figure 3;COPYRIGHT: (C)2018,JPO&INPIT
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