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DIE, DIE PACK, SINGLE CRYSTAL GROWTH APPARATUS AND SINGLE CRYSTAL GROWTH METHOD

机译:Die,Die PACK,单晶生长装置和单晶生长方法

摘要

PROBLEM TO BE SOLVED: To provide a die having an opening angle easily and optimally settable to the thickness of a single crystal to be grown; a die pack; a single crystal growth apparatus; and a single crystal growth method.;SOLUTION: The tip of a die having a slit and used for an EFG method is formed at an opening angle y1 (where, y1180°). The opening angle y1 is formed at an angle associated with a linear function formula y=ax+b (where, y180°, x0 mm, a0, b0°) of the thickness x mm of the die; b is 47.0° or more and 47.39°or less; the thickness x is 3.3 mm or more and 6.5 mm or less; and a is 7.75 or more and 7.80 or less. The opening angle y1 is within ±5% of the linear function formula. The die pack includes such two or more dice and is constituted so that the longitudinal direction of each slit is arranged in parallel; the single crystal growth apparatus includes the die or the die pack; and the single crystal growth method is formed using the die, the die pack or the single crystal growth apparatus.;SELECTED DRAWING: Figure 3;COPYRIGHT: (C)2018,JPO&INPIT
机译:解决的问题:提供一种具有容易且最佳地设定为待生长的单晶厚度的开模的模具;模具包装;单晶生长装置;溶液:具有狭缝且用于EFG方法的模具的尖端形成为张角y1(其中y1 <180°)。开口角y1以与模具的厚度xmm的线性函数公式y = ax + b(其中y <180°,x> 0mm,a> 0,b> 0°)相关的角度形成。 ; b为47.0°以上且47.39°以下;厚度x为3.3mm以上且6.5mm以下。 a为7.75以上且7.80以下。开启角y1在线性函数公式的±5%之内。模具组件包括两个或多个这样的骰子,并且被构造成使得每个狭缝的纵向方向平行地布置。单晶生长设备包括管芯或管芯组件;单晶生长方法是使用模具,模具组件或单晶生长设备形成的;选图:图3;版权:(C)2018,JPO&INPIT

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