MANUFACTURING METHOD OF MAGNETIC SENSOR MAGNETO-SENSITIVE MATERIAL ACHIEVING HIGH-ACCURACY MEASUREMENT

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of magnetic sensor magneto-sensitive material, capable of preventing the generation of abnormal noise in an output voltage and achieving higher accurate measurement in comparison with the conventional magneto-sensitive material.;SOLUTION: There is provided a manufacturing method of a magneto-sensitive material applicable to a flux gate sensor that comprises a magneto-sensitive material including an amorphous wire for detecting magnetism and a detection coil around the magneto-sensitive material, and can measure strength of a magnetic field by magnetizing the magneto-sensitive material by AC current to detect a voltage generated in a detection coil according to the strength of an external magnetic field. The manufacturing method subjects an amorphous wire manufactured by an in-rotating liquid spinning method or a single roll liquid quenching method or the amorphous wires to finishing processing, and performs, to the amorphous wire thus manufactured, removal processing of a process-affected residual layer generated on the surface or in the vicinity of the amorphous wire under the condition that a cross sectional area decrease rate to the cross section of the wire before the removal processing is 1.0 to 75.0%.;SELECTED DRAWING: Figure 3;COPYRIGHT: (C)2018,JPO&INPIT