QUALITY MONITORING APPARATUS, QUALITY MONITORING SYSTEM, QUALITY MONITORING METHOD AND PROGRAM

摘要

PROBLEM TO BE SOLVED: To be able to monitor the process of batch processing even if the state value exceeds the threshold value.;SOLUTION: A quality monitoring apparatus that monitors a process of batch processing, stores measurement data indicating a physical quantity measured in the process, compares a state value indicating a state of an object to be processed in the process with a preset threshold value, and determines whether the process is a first process having the state value equal to or less than the threshold value or a second process having the state value exceeding the threshold value. When the state value is equal to or less than the threshold value as a result of the comparison, the quality monitoring apparatus calculates a quality index of a process based on the measurement data and a predetermined model, determines the quality of the first process based on the quality index, and stores the quality determination result based on this first determination. When the state value exceeds the threshold value as a result of the comparison, the quality monitoring apparatus generates a determination condition based on the measurement data and the quality determination result, and determines the quality of the second process based on the determination condition.;SELECTED DRAWING: Figure 12;COPYRIGHT: (C)2018,JPO&INPIT