SHEET WITH FINE UNEVEN STRUCTURE, INORGANIC MATERIAL PACKED SHEET, RESIST SHEET WITH FINE UNEVEN STRUCTURE, SUBSTRATE WITH FINE UNEVEN STRUCTURE, AND MANUFACTURING METHOD OF SUBSTRATE WITH FINE UNEVEN STRUCTURE

摘要

PROBLEM TO BE SOLVED: To provide a sheet with a fine uneven structure allowing appropriate discrimination of the orientation of the fine uneven structure to an orientation flat of a substrate, and the substrate with the fine uneven structure capable of appropriately suppressing the variation of the orientations of the fine uneven structure to the orientation flat of the substrate.;SOLUTION: A sheet 1 with a fine uneven structure has a periodic fine uneven structure 2 on a surface, and the fine uneven structure 2 has at least two different kinds of arrangement patterns. The sheet 1 with the fine uneven structure has a periodic linear mark (Z-line) in the longitudinal direction (Y-direction) of the sheet 1 with the fine uneven structure over the width direction (X-direction) of the surface of the sheet 1 with the fine uneven structure.;SELECTED DRAWING: Figure 2;COPYRIGHT: (C)2018,JPO&INPIT