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STRAIN SENSOR AND AMOUNT-OF-STRAIN MEASURING METHOD
STRAIN SENSOR AND AMOUNT-OF-STRAIN MEASURING METHOD
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机译:应变传感器和应变量的测量方法
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摘要
PROBLEM TO BE SOLVED: To provide a strain sensor capable of improving amount-of-strain measurement accuracy by eliminating influences due to a temperature change, and an amount-of-strain measuring method.SOLUTION: A strain sensor comprises: markers 3 installed on a surface of a measuring object W and regularly arranged in the same cycle in two directions parallel to an in-plane direction of a light-receiving surface of a strain element in which a particle which generates a surface plasmon is strained due to a load; a first detecting unit (detecting unit 4) which detects a spectral intensity of the light reflected or transmitted by the markers 3; a second detecting unit (signal processing unit 5) which detects an absorption spectrum peak corresponding to each arrangement direction of particles 32 on the basis of the spectral intensity detected by the first detecting unit; and a calculating unit (signal processing unit 5) which calculates an amount of strain generated in the markers 3 on the basis of a wavelength difference between the two absorption spectrum peaks detected by the second detecting unit.SELECTED DRAWING: Figure 1
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