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STRAIN SENSOR AND AMOUNT-OF-STRAIN MEASURING METHOD

机译:应变传感器和应变量的测量方法

摘要

PROBLEM TO BE SOLVED: To provide a strain sensor capable of improving amount-of-strain measurement accuracy by eliminating influences due to a temperature change, and an amount-of-strain measuring method.SOLUTION: A strain sensor comprises: markers 3 installed on a surface of a measuring object W and regularly arranged in the same cycle in two directions parallel to an in-plane direction of a light-receiving surface of a strain element in which a particle which generates a surface plasmon is strained due to a load; a first detecting unit (detecting unit 4) which detects a spectral intensity of the light reflected or transmitted by the markers 3; a second detecting unit (signal processing unit 5) which detects an absorption spectrum peak corresponding to each arrangement direction of particles 32 on the basis of the spectral intensity detected by the first detecting unit; and a calculating unit (signal processing unit 5) which calculates an amount of strain generated in the markers 3 on the basis of a wavelength difference between the two absorption spectrum peaks detected by the second detecting unit.SELECTED DRAWING: Figure 1
机译:解决的问题:提供一种应变传感器,其能够通过消除由于温度变化引起的影响而提高应变量的测量精度,以及应变量的测量方法。解决方案:应变传感器包括:安装在其上的标记3测量对象物W的表面,在与应变元件的受光面的面内方向平行的两个方向上以相同的周期规则地配置,该应变元件中,由于负荷而使产生表面等离子体激元的粒子应变。第一检测单元(检测单元4)检测由标记3反射或透射的光的光谱强度。第二检测单元(信号处理单元5)基于由第一检测单元检测到的光谱强度来检测与颗粒32的每个排列方向相对应的吸收光谱峰;以及计算单元(信号处理单元5),其基于由第二检测单元检测到的两个吸收光谱峰之间的波长差来计算在标记3中产生的应变的量。

著录项

  • 公开/公告号JP2018071998A

    专利类型

  • 公开/公告日2018-05-10

    原文格式PDF

  • 申请/专利权人 KONICA MINOLTA INC;

    申请/专利号JP20160208252

  • 发明设计人 UEMURA HIDEO;IKEDA KAZUKI;OKI MAKOTO;

    申请日2016-10-25

  • 分类号G01B11/16;G01N21/41;

  • 国家 JP

  • 入库时间 2022-08-21 13:10:53

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