DEGREE OF CONTAMINATION DETERMINATION DEVICE AND DEGREE OF CONTAMINATION DETERMINATION METHOD OF CLEANING FLUID

摘要

PROBLEM TO BE SOLVED: To provide a degree of contamination determination device and a degree of contamination determination method capable of easily determining a degree of contamination of cleaning fluid.;SOLUTION: A degree of contamination determination device for determining a degree of contamination of cleaning fluid used for cleaning a cleaning object includes: a turbidity measurement section for measuring turbidity T of the cleaning fluid; an electric conductivity measurement section for measuring electric conductivity σ of the cleaning fluid; a pH measurement section for measuring pH of the cleaning fluid; a storage section for storing each measurement value; and a calculation section for calculating a degree of contamination using the measurement value.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2018,JPO&INPIT