METAL POLLUTION PREVENTION METHOD, METAL POLLUTION PREVENTION MEMBRANE, METAL POLLUTION PREVENTION METHOD AND PRODUCT CLEANING METHOD

摘要

PROBLEM TO BE SOLVED: To reduce adhesiveness of trace metal in super pure water for product cleaning and suppress metal pollution of an object for cleaning.SOLUTION: There is provided a metal pollution prevention agent containing a polymer having an ion exchange group such as a polystyrene sulfonic acid with molecular weight of 100,000 or more. A primer having an ion exchange group absorbs trace metal in super pure water by an ion exchange reaction and can suppress adhesion to a product. There is provided a product cleaning method for cleaning the product by super pure water to which the metal pollution prevention agent is added. Preferably the super pure water to which the metal pollution prevention agent is added is flown to a separation membrane module and the product is cleaned by membrane permeable water.SELECTED DRAWING: Figure 1