Thermal interface materials using metal nanowire arrays and sacrificial templates

摘要

A method of making a thermal interface material (TIM) includes depositing a seed layer on a substrate, attaching a template film to the substrate, depositing a metal in one or more of the holes in the template film, Substantially filling the template film to form a vertically aligned metal nanowire (MNW) array comprising a plurality of nanowires growing upward from the seed layer, and the template film substantially filled with deposited metal Thereafter, the method includes a step of removing the template film, leaving a plurality of nanowires attached to the seed layer. The TIM comprises an MNW array comprising a plurality of nanowires that grow upward from a seed layer deposited on the surface of the template film, the template film being removed after the MNW growth. [Selection] Figure 1