Flexible conductive vibration membrane, flexible vibration sensor, and manufacturing method and application thereof

摘要

A flexible conductive vibration membrane, a manufacturing method thereof, and a flexible vibration sensor based on the flexible conductive vibration membrane, wherein the flexible conductive vibration membrane is provided on a flexible support layer (1) and a flexible support layer (1) in a superimposed manner. A conductive layer including a sensitive layer (2), a flexible conductive layer (3) provided to overlap the flexible sensitive layer (2), and an electrode (4) electrically connected to the flexible conductive layer (3). At least a film is included. By adopting a combination of technologies such as flexible materials, nanomaterials and array microstructures, the resulting flexible vibration sensor is highly sensitive, low in manufacturing cost, light in weight, thin in thickness, small in volume, It can be bent and applied to wearable and pasted electronic devices. [Selection] Figure 1