METHOD FOR REFINING CHEMICAL LIQUID FOR SEMICONDUCTOR PHOTOLITHOGRAPHY, REFINING DEVICE FOR CHEMICAL LIQUID FOR SEMICONDUCTOR PHOTOLITHOGRAPHY, AND CHEMICAL LIQUID FOR SEMICONDUCTOR PHOTOLITHOGRAPHY

摘要

A method of purifying a liquid chemical for semiconductor photolithography including filtering a liquid chemical using a filter unit, and setting a temperature of the liquid chemical passing through at least the filter unit to be lower than room temperature. The temperature which is lower than room temperature is preferably 25° C.