Circulation type helium recondensation apparatus and circulation type helium recondensation method

摘要

PROBLEM TO BE SOLVED: To provide a circulation type helium recondensation device and a circulation type helium recondensation method capable of stably performing recondensation of helium gas.SOLUTION: A circulation type helium recondensation device comprises a control section 33 which: is electrically connected to a flow rate measurement section 27, an automatic control valve 31 and a pressure measurement section 29; calculates a first control signal necessary to perform PID control of an opening of the automatic control valve 31 in a manner that stabilizes a pressure value measured by the pressure measurement section 29 at a predetermined target pressure value; and calculates a second control signal necessary to perform the PID control of the opening of the automatic control valve 31 in a manner that stabilizes a flow rate value measured by the flow rate measurement section 27 at a predetermined target flow rate value.SELECTED DRAWING: Figure 1