Irradiation apparatus, laser microscope system, irradiation method, and detection method of laser microscope

摘要

Provided are an irradiation apparatus, a laser microscope system, an irradiation method, and a detection method for a laser microscope, which can further widen the bandwidth of detection light as a multiplexed signal. The laser light is separated and incident on the first AOD (24) and the second AOD (34) to generate a plurality of first diffracted light and second diffracted light having different deflection angles and different frequency shifts. The beam splitter (19) superimposes the first diffracted light and the second diffracted light to generate a plurality of interference lights having different beat frequencies. The objective lens (52) forms a plurality of interference light irradiation spots in a line in the main scanning direction, and irradiates the sample (T) with the interference light. The irradiation spot is moved in the sub-scanning direction orthogonal to the main scanning direction by swinging the scanning mirror (47a). Fluorescence emitted from the sample (T) upon irradiation with each interference light is detected by the light detection unit (13).