Scanning transmission electron microscope image acquisition method and scanning transmission electron microscope

摘要

PROBLEM TO BE SOLVED: To provide a scanning and transmission type electron microscope capable of achieving a scanning and transmission type electron microscopic image on which correction of an experimental image has been accurately performed.SOLUTION: A scanning and transmission type electron microscope has: a bright field detector for accelerating an electron beam discharged from an electron source, irradiating the electron beam so that the focal point of the electron beam is located at a sample, and detects an electron beam transmitted through or scattered from the sample to achieve a bright field image; and an electron energy loss spectroscope for achieving an energy spectrum of the sample. The sample is set up, an energy spectrum is achieved, an elastic scattering image and a non-elastic scattering image are achieved, and the average intensities of the elastic scattering image and the non-elastic scattering image are calculated, the rate of the average intensity of the elastic scattering image to the sum of the average intensities is calculated, and a bright field image is achieved and multiplied by the rate of the average intensity of the elastic scattering image, thereby performing an image operation.SELECTED DRAWING: Figure 8