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Method of designing opening pattern, image restoration method and image restoration apparatus

机译:设计开口图案的方法,图像恢复方法和图像恢复设备

摘要

PROBLEM TO BE SOLVED: To allow image restoration to be preferably performed even when capturing an image by light having a narrow wavelength band.SOLUTION: An imaging portion of a positioning device that functions as an image restoration device is provided with an aperture diaphragm having an aperture pattern. In designing the aperture pattern, a plurality of candidate patterns are prepared. A PSF (Point Spread Function) of each candidate pattern is determined as a multi-gradation image by calculation (a step S22). A wavelength band of light is narrow, and an airy pattern appears in the PSF. Using the PSF, an evaluation value of each candidate pattern is determined (a step S23). The evaluation value indicates precision in restoration of a blurred image using the PSF. Based on the evaluation value, one of the plurality of candidate patterns is selected (a step S30). By utilizing the multi-gradation PSF, even when capturing an image by light having a narrow wavelength band, an aperture pattern that achieves preferable image restoration can be designed.
机译:解决的问题:为了即使在通过窄波段的光捕获图像时也优选地执行图像恢复。解决方案:用作图像恢复设备的定位设备的成像部分设置有具有光圈的光圈。光圈图案。在设计孔径图案时,准备了多个候选图案。通过计算将每个候选图案的PSF(点扩展函数)确定为多灰度图像(步骤S22)。光的波长带很窄,并且在PSF中出现了通风的图案。使用PSF,确定每个候选图案的评估值(步骤S23)。评估值表示使用PSF恢复模糊图像的精度。基于评估值,选择多个候选模式之一(步骤S30)。通过利用多灰度级PSF,即使当通过具有窄波长带的光捕获图像时,也可以设计实现优选的图像恢复的孔径图案。

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