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Techniques for determining mirror position in optical interferometers.
Techniques for determining mirror position in optical interferometers.
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机译:确定光学干涉仪中反射镜位置的技术。
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摘要
A Micro Electro-Mechanical System (MEMS) interferometer system utilizes a capacitive sensing circuit to determine the position of a moveable mirror. An electrostatic MEMS actuator is coupled to the moveable mirror to cause a displacement thereof. The capacitive sensing circuit senses the current capacitance of the MEMS actuator and determines the position of the moveable mirror based on the current capacitance of the MEMS actuator.
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