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Perpendicular for perpendicular magnetization film, perpendicular magnetization film structure, perpendicular MTJ element, and perpendicular magnetic recording medium using them
Perpendicular for perpendicular magnetization film, perpendicular magnetization film structure, perpendicular MTJ element, and perpendicular magnetic recording medium using them
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机译:垂直用于垂直磁化膜,垂直磁化膜结构,垂直MTJ元件以及使用它们的垂直磁记录介质
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摘要
Disclosed is a perpendicularly magnetized film structure that uses a highly heat resistant underlayer film on which a cubic or tetragonal perpendicularly magnetized film can grow with high quality, the structure comprising any one substrate (5) of a cubic single crystal substrate having a (001) plane, or a substrate having a cubic oriented film that grows to have the (001) plane; an underlayer (6) formed on the substrate (5) from a thin film of a metal having an hcp structure, such as Ru or Re, in which the [0001] direction of the thin metal film forms an angle in the range of 42° to 54° with respect to the 001 direction or the (001) orientation of the substrate (5); and a perpendicularly magnetized layer (7) located on the metal underlayer (6) and formed from a cubic material selected from the group consisting of a Co-based Heusler alloy, a cobalt-iron (CoFe) alloy having a bcc structure, and the like, as a constituent material, and grown to have the (001) plane.
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