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System and method for monitoring failures, anomalies, and other characteristics of switching mode ion distribution systems
System and method for monitoring failures, anomalies, and other characteristics of switching mode ion distribution systems
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机译:用于监视开关模式离子分配系统的故障,异常和其他特征的系统和方法
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摘要
Systems, methods and apparatus for regulating ion energies in a plasma chamber and chucking a substrate to a substrate support are disclosed. An exemplary method includes placing a substrate in a plasma chamber, forming a plasma in the plasma chamber, controllably switching power to the substrate so as to apply a periodic voltage function (or a modified periodic voltage function) to the substrate, and modulating, over multiple cycles of the periodic voltage function, the periodic voltage function responsive to a defined distribution of energies of ions at the surface of the substrate so as to effectuate the defined distribution of ion energies on a time-averaged basis.
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