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Electrostatic chuck with independent zone cooling and reduced crosstalk
Electrostatic chuck with independent zone cooling and reduced crosstalk
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机译:带有独立区域冷却和减少串扰的静电吸盘
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摘要
An electrostatic chuck is described with independent zone cooling that leads to reduced crosstalk. In one example, the chuck includes a puck to carry a substrate for fabrication processes, and a cooling plate fastened to and thermally coupled to the ceramic puck, the cooling plate having a plurality of different independent cooling channels to carry a heat transfer fluid to transfer heat from the cooling plate.
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