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Method for reducing core-to-core mismatches in SOC applications
Method for reducing core-to-core mismatches in SOC applications
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机译:减少SOC应用中核心到核心不匹配的方法
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摘要
Methods for reducing core-to-core mismatch are provided. The method includes measuring gate lengths of a representative pattern of each core in a first lot of SOC products by a measurement apparatus. Each of the SOC products in the first lot includes more than two cores identical to each other. The method also includes determining a tuning amount according to the differences between the gate lengths of each core, and adjusting at least one mask for critical dimensions of gate length of each core in a second lot of SOC products respectively according to the tuning amounts.
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