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Method, apparatus and system for forming recolorable standard cells with triple patterned metal layer structures
Method, apparatus and system for forming recolorable standard cells with triple patterned metal layer structures
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机译:形成具有三重图案化金属层结构的可重着色标准电池的方法,设备和系统
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摘要
At least one method, apparatus and system disclosed herein for forming a semiconductor device comprising a plurality of cells having metal features formed using triple patterning processes. An overall pattern layout is created for a first cell that is to be manufactured using a triple patterning process for forming a plurality of metal features on a metal layer. A first color metal feature is formed in the metal layer. The first color metal feature is associated with a first patterning process of the triple patterning process. A second color metal feature is formed in the metal layer. The second color metal feature is associated with a second patterning process of the triple patterning process. A third color metal feature is formed in the metal layer. The third color metal feature is associated with a third patterning process of the triple patterning process. At least one of the first, second, and third color metal features is re-colorable.
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