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INTEGRATED IMAGING SENSOR WITH TUNABLE FABRY-PEROT INTERFEROMETER
INTEGRATED IMAGING SENSOR WITH TUNABLE FABRY-PEROT INTERFEROMETER
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机译:带可调法布里-珀罗干涉仪的集成式成像传感器
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摘要
An integrated device including a photodetector, a transparent substrate, and one or more spacers. The photodetector is formed in a portion of a wafer. The one or more spacers separate the photodetector and the transparent substrate.
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