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Method for making thermoacoustic device array
Method for making thermoacoustic device array
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机译:一种热声器件阵列的制作方法
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摘要
A method for making a thermoacoustic device array includes the following step. A substrate having a surface is provided. The surface defines a grid having a number of cells. A number of holes are defined on each of the cells. A first electrode and a second electrode are formed on each of the cells. The first electrode is spaced from the second electrode, and one row of the holes is located between the first electrode and the second electrode. A sound wave generator is applied on the substrate and electrically connected to the first electrode and the second electrode. The sound wave generator is suspended over the holes. The sound wave generator is divided according to the cells.
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