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Method for making thermoacoustic device array

机译:一种热声器件阵列的制作方法

摘要

A method for making a thermoacoustic device array includes the following step. A substrate having a surface is provided. The surface defines a grid having a number of cells. A number of holes are defined on each of the cells. A first electrode and a second electrode are formed on each of the cells. The first electrode is spaced from the second electrode, and one row of the holes is located between the first electrode and the second electrode. A sound wave generator is applied on the substrate and electrically connected to the first electrode and the second electrode. The sound wave generator is suspended over the holes. The sound wave generator is divided according to the cells.
机译:制造热声器件阵列的方法包括以下步骤。提供具有表面的基板。该表面限定了具有多个单元的网格。在每个单元上定义了多个孔。在每个单元上形成第一电极和第二电极。第一电极与第二电极间隔开,并且一排孔位于第一电极和第二电极之间。声波发生器被施加在基板上并且电连接到第一电极和第二电极。声波发生器悬挂在孔上。声波发生器按单元划分。

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